Study of the parameters affecting ion beam emerging from cold conical cathode ion source
نویسندگان
چکیده
منابع مشابه
High-brightness Cs focused ion beam from a cold-atomic-beam ion source
We present measurements of focal spot size and brightness in a focused ion beam system utilizing a laser-cooled atomic beam source of Cs ions. Spot sizes as small as (2.1 ± 0.2) nm (one standard deviation) and reduced brightness values as high as (2.4 ± 0.1) × 107 A m-2 Sr-1 eV-1 are observed with a 10 keV beam. This measured brightness is over 24 times higher than the highest brightness observ...
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ژورنال
عنوان ژورنال: Brazilian Journal of Physics
سال: 2010
ISSN: 0103-9733
DOI: 10.1590/s0103-97332010000300013